Kwiminyaka yakutshanje, itekhnoloji yenzwakazi yam ikhula ngokukhawuleza, kwaye amasimi awo isicelo ayanda. Njengoko uninzi lohlobo oluqolileyo lwetekhnoloji yemilinganiselo yemilinganiselo, itekhnoloji entsha, izixhobo ezintsha kunye neenkqubo ezintsha zihlala zisahluma kwicandelo lezinzwa zoxinzelelo.
Inzwa yoxinzelelo sisixhobo esisetyenziselwa ukufumana imiqondiso yoxinzelelo kwaye siziguqule zibe yimiqondiso yombane ngokwemigaqo ethile. Isetyenziswe ngokubanzi kwimveliso eyahlukeneyo, imizi-mveliso kunye ne-aerospaces.iklizulo lweendawo ezinobushushu kunye neqondo lokusebenza leqondo le-oyile kunye ne-injini yokusebenza ye-oyile engaphantsi kwe-120 ° C). I-C C) iya kusilela, ikhokelela ekungaphumlweni koxinzelelo. Ke ngoko, i-Sorce ephezulu yobushushu iba yeyona ndlela ibaluleke kakhulu yophando.
Ukwahlulahlulwa kweenzwa zeqondo lokuxabaza amaqondo obushushu
Ngokwezixhobo ezahlukeneyo ezisetyenzisiweyo, iinzwa zamanani amaqondo obushushu anokwahlula-hlula-hlula-hlula-hlulwa nge-Polysilicon (Poly-Safre-Sure-Sappire Sensor, i-SILINE (i-Silicon kwi-Sappren-Sappire ye-Sapdire), imeko yophando kunye nethemba I-SOI I-SECRE-HARD CHRASSE CORSORS iluncedo kakhulu. Oku kulandelayo kwazisa i-SOI i-Soi Sersus Sensor Sensor.
Isixhobo seqondo lesazisi seSoI
Ukuphuhliswa kweenzwa zeqondo lobushushu be-soi ikakhulu kuxhomekeke ekunyukeni kwezixhobo zeSoi.soi sisifo se-semicondcuction e-SEICOSTCE YENKONZO KUNYE NOKUGQIBELA I-SEECKER FITE YENKCAZO YOKUGQIBELA NOKUFUNDA I-SEATK SINCY SINK, kwaye iphucule i Ukuthembeka kwesixhobo.Ukuhlelwa, ngenxa yeempawu eziphezulu zobushushu bomsebenzi wesixhobo se-soI, iba yinto efanelekileyo yokulungiselela iinzwa zeqondo loxinzelelo lobushushu.
Okwangoku, izinzwa ze-SOLI I-HEARDS HIPERORS iphuhliswe ngempumelelo, kwaye amaqondo obushushu asebenzayo aneminyaka engama-55 ° 480 ° 2 ° C; Isixhobo se-SOI I-Sensor ephezulu yobushushu ephuhliswe yi-French Leti ikwaneqondo lokusebenza elingaphezulu kwe-400 ° CARTS kwakhona iYunivesithi ye-SOI, njengeYunivesithi yase-jiaotong, iYunivesithi yaseTiaotong, kunye neYunivesithi yaseTiikin. Ukongeza, i-Fatri yeTekhnoloji yoPhando yeTekhnoloji ePhezulu yeTetori ikwasebenza nomsebenzi wophando onxulumene noko, kwaye iprojekthi yangoku ingene kwinqanaba lokubonisa.
UMGAQO-NKQUBO WOKUSETYENZISWA KWEEMPENDULO EZIQHELEKILEYO
Kwimigaqo, i-Soi High Senright isebenziseka ikakhulu i-piezorel silicon. ukwenza ibhulorho ye-Wheatsbolbo ye-Wheatsbon njengoko kubonisiwe kumzobo 2 (a); I-cavity yengcinezelo yengcinezelo ikhutshiwe kwi-SOI subrate subter ukwenza uxinzelelo loxinzelelo.
Umzobo 2 (a) ibhlorho ye-Hartstone
Xa uxinzelelo olukhankanya uxinzelelo lubekwe uxinzelelo lomoya, ukuxhathisa kwePiezoreristor, ethi yona ithengela ivoti yemveliso yemveliso yokutshintsha, kwaye ixabiso loxinzelelo lilingane nexabiso le-piezoristor.
Inkqubo yokutsala ye-SOI Inqikelelo yeqondo lobushushu
Inkqubo yokulungiselela yeSoi Inqikelelo ePhakamileyo yeqondo lobushushu ibandakanya iinkqubo ezininzi ze-MAM. Amanye amanyathelo aphambili awaziswa ngokufutshane apha ukuba aqonde inkqubo yenzwa, ikakhulu kubandakanya ukulungiswa kwe-Piezores, ukulungiselela i-Piezores, iNkqubo yokulungiselela ifilimu, kunye nephanyano lwe-hicocial.
Isitshixo sokulungiswa kwabahlobo abalele kulawulo lwendlela yokuhamba kunye nokusebenza kwenkqubo yokuhlwayela elandelayo; I-aler yentsimbi ekhokelayo ikakhulu isebenza njengokunxibelelana kwebhulorho yelo fundle; Ulungiselelo lwengcinezelo yefilimu enobuthathaka ixhomekeke kwinkqubo yenkqubo yokuphuma kwe-Silicon ye-Estching; Ukupakishwa kwe-cavity kuhlala kungahluka ngokuxhomekeke kwisicelo sobushushu,
Kuba iinzwa zangoku zenzelwa amaqondo obushushu akhutshiweyo anokufezekisa iinjongo zoxinzelelo lweendawo ezinobunzima ezifana ne-oyile ephezulu ye-oyile kunye ne-aero-injini enkulu. Uphando lwexesha elizayo kwi-SOI Inzwakazi ephezulu yeqondo lobushushu kufuneka igxile ekusombululeni uzinzo lwexesha elide kunye neengxaki zokuzifudumala kwezinzwa kwiindawo ezineqondo lokushisa kunye nokuphucula ukuchaneka kwezinzwa zoxinzelelo. Inqaku.
Ewe kunjalo, ukukhula kwexesha elikrelekrele kukwafuna oosoyeza beqondo lokushishina eliphezulu elidityanisiweyo kunye nenye itekhnoloji yokuzibandakanya, ukuze ugqibezele imbuyekezo, ukuze ugqibezele umsebenzi onobushushu obunobushushu obunesimo sendalo. .
IXESHA LOKUQALA: NgoFebwe-13 ukuya ku-923